Fastest Response

Picarro provides industry leading solutions for real-time AMC monitoring. Based on our cavity ring-down spectroscopy (CRDS) technology, we offer significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Both legacy techniques have traditionally been used to monitor inorganic gases such as NH3, HF, HCl and H2S in cleanroom environments, but suffer the inadequacies of high costs of ownership, performance shortfalls, and slow speeds of response.

Picarro SI2000 Series analyzers enable fast response to contaminants in the cleanroom in seconds, not hours. With real-time continuous parts-per-trillion (ppt) level analysis in seconds, Picarro analyzers provide early warning of contamination events for AMC monitoring in cleanrooms, FOUP, and FAB equipment.

Picarro SI2000 Series analyzers response time measurements are calculated using raw data from humid concentration challenges and humid zero concentrations. 10/90 response time is defined as the length of time in seconds the analyzer requires to measure from 10% of the expected concentration to 90% of the expected concentration. 90/10 response time is defined as the length of time in seconds the analyzer requires to measure from 90% of the expected concentration to 10% of the expected concentration.

NH3 and HF

H2S

HCl