Fastest Response for Chemical Contamination Monitoring

The Picarro SAM-S and SAM-C AMC Monitoring Systems integrate Picarro’s industry leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system. Traditional sampler designs degrade individual analyzer performance through the use of a linear manifold which limits the gas flow rate to each analyzer. As a result, traditional samplers relegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether.

The superior design of the SAM system is optimized to ensure the highest combined performance, utilizing a patent-pending non-linear multiplexing system that enables high gas flow rates, minimizes cross port contamination, and quickly reports accurate contaminant concentrations. The Picarro SAM-S and SAM-C systems can be configured to sample multiple locations, accommodate multiple analyzers, and be paired with Picarro’s SI series of analyzers to measure a variety of contaminants.

The Picarro SI Series analyzers offer the power of extreme sensitivity and accuracy for AMC, FOUP and fab equipment monitoring in a highly reliable, simple and compact design. These analyzers combine best-in-class performance, SEMI standards compliance, easy installation and very low cost of annual maintenance compared to any other AMC monitoring technique.

Image of Picarro SAM Systems

Key features

  • Inline AMC monitoring system
  • Measures NH3, HF and HCl at ppt levels
  • Response time within seconds
  • Minimal setup time
  • Monitor multiple locations within a cleanroom
  • 8-, 16- or 32-port sampling system
  • Onboard industrial computer with built-in keyboard
  • Secure software and communications
  • Programmed cleaning cycle
  • Scheduled port purging to minimize cross port contamination

Benefits

  • Long term accuracy
  • No field calibration
  • Fast recovery from pressure spikes (20s)
  • Automatic bypass control
  • Minimal maintenance
  • Low cost of ownership

Compatible Analyzers

Analyzer Gas
SI3401
  • Ammonia (NH3)
  • Hydrogen Fluoride (HF)
  • Hydrogen Chloride (HCl)
SI2104
  • Hydrogen Sulfide (H2S)
SI5450
  • Sulfur Dioxide (SO2)