Fastest Response

The Picarro SAM-S AMC Monitoring System integrates Picarro’s industry leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system. Traditional sampler designs degrade individual analyzer performance through the use of a linear manifold which limits the gas flow rate to each analyzer. As a result, traditional samplers relegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether. The superior design of the SAM-S system is optimized to ensure the highest combined performance, utilizing a patent-pending non-linear multiplexing system that enables high gas flow rates, minimizes cross port contamination, and quickly reports accurate AMC concentrations. The Picarro system can be configured to sample up to 16 different locations and pairs with Picarro’s SI3401 gas analyzer to measure ammonia (NH3), hydrogen fluoride (HF), and hydrogen chloride (HCl).

The Picarro SI Series analyzers offer the power of extreme sensitivity and accuracy for AMC, FOUP and fab equipment monitoring in a highly reliable, simple and compact design. These analyzers combine best-in-class performance, SEMI standards compliance, easy installation and very low cost of annual maintenance compared to any other AMC monitoring technique.

Key features:

  • Inline AMC monitoring system
  • Measures NH3, HF and HCl at ppt levels
  • Response time within seconds
  • Minimal setup time
  • Monitor multiple locations within a cleanroom
  • 8 or 16 port sampling system
  • Onboard industrial computer with built-in keyboard
  • Secure software and communications
  • Programmed cleaning cycle
  • Scheduled port purging to minimize cross port contamination

Benefits

  • Long term accuracy
  • No field calibration
  • Fast recovery from pressure spikes (20s)
  • Automatic bypass control
  • Minimal maintenance
  • Low cost of ownership