Semi Compliant
Every company will make a commitment to Quality and Compliance, but our Picarro team is taking this commitment to a higher level. Our factory meets all of the requirements for manufacturing scientific instruments here in the USA (FDA and IEC Laser Safety Standards, CE Compliance, etc.) In addition, we’re committed to meeting our customers’ Industry Standards for the analyzers and applications we perform in their facilities. For our Semiconductor customers, this means the implementation of applicable SEMI performance and safety standards, and the IEC Performance standards for Process Analyzers. Our customers can be confident that their Picarro laser analyzers are performing to specifications defined by their own industry experts.
SEMI S2-0712a - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment: This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.
SEMI E10 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) is the ‘granddaddy’ of SEMI equipment performance and productivity metrics and is one of the most widely used SEMI standards. SEMI E10 establishes definitions for basic equipment conditions, RAM metrics, and equipment utilization measurement providing a common language and methodology between equipment suppliers and users. “[SEMI E10] has become a standard for tracking performance of the semiconductor manufacturing equipment and a benchmark for other industries.” (Dhudshia 2008 p. 35)
SEMI C10-1109 - Guide for Determination of Method Detection Limits: This standard was technically approved to provide a minimal set of guidelines for the quantitative determination of a method detection limit (MDL) from data supporting a SEMI Process Chemicals or Gases specification.
Performance Standards
IEC 61207-1:2010 - Expression of performance of gas analyzers - General: This standard specifies the terminology, definitions, requirements for statements by manufacturers and tests that are common to all gas analyzers. It is applicable to analyzers specified for permanent installation in any location (indoors or outdoors) and to such analyzers utilizing either a sample handling system or an in-situ measurement technique. It is applicable to the complete analyzer when supplied by one manufacturer as an integral unit, comprised of all mechanical, electrical and electronic portions. It also applies to sensor units alone and electronic units alone when supplied separately or by different manufacturers.
IEC 61207-7:2013 Expression of performance of gas analyzers - Tuneable semiconductor laser gas analyzers: This includes the terminology, definitions, statements and tests that are specific to tuneable semiconductor laser gas analyzers, which utilize tuneable semiconductor laser absorption spectroscopy (TSLAS). It applies to all aspects of analyzers utilizing TSLAS for the concentration measurement of one or more gas components in a gaseous mixture or vapor. It applies to analyzers utilizing tuneable semiconductor lasers as sources and utilizing absorption spectroscopy, such as direct absorption, FMS, WMS, multi-pass absorption spectroscopy, CRDS, ICOS, PAS and CEAS techniques, etc.
Safety Standards
IEC 60825-1: Safety of laser products - Part 1: Equipment classification and requirements: The system shall be fully compliant with laser class 1 according to IEC 60825-1, eye safe. This requirement defines the maximum output power.
IEC 61010-1: Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use - Part 1: General Requirements: This is equipment which by electromagnetic means tests, measures, indicates or records one or more electrical or physical quantities, also non-measuring equipment such as signal generators, measurement standards, power supplies for laboratory use, transducers, transmitters, etc. NOTE 1: This includes bench-top power supplies intended to aid a testing or measuring operation on another piece of equipment. Power supplies intended to power equipment are within the scope of IEC 61558 (see 1.1.2 h).