Gas Concentration Analyzer for Hydrogen Chloride (HCl) 

AMC Monitoring for Inorganic Gases

The Picarro SI2108 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen chloride (HCI) in a reliable, easy-to-use, compact design. The SI2108 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.

  • Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
  • Fast, continuous analysis in seconds
  • Virtually no downtime or consumables cost
  • Free of interference from common fab chemicals
  • Extreme accuracy for event confirmation
  • No field calibration required
Analyzer Product Image
Gas Detected Hydrogen Chloride (HCl)
Precision (1σ) ≤45 ppt (10 sec),
≤15 ppt (100 sec)
Lower Detectable Limit (3σ) 45 ppt
Method Detection Limit
(per Semi C10-1109)
250 ppt
(per IEC 61207)
Accuracy at span ±5% @ full scale
Accuracy at zero ±50 ppt
Instrument-to-Instrument Consistency ±5% @ full scale
±50 ppt @ zero
Measurement Range 0-2 ppm
Measurement Interval* < 3s
Sample Flow Rate ~2 slpm
Combined Response Times
(T90/10 + T10/90) @ 20 ppb
<3 min
Fall Times
T90/10 @ 20 ppb
<1 min

*-Measurement interval at span may increase as much as 2x above listed values.

Measurement Technique Cavity Ring-Down Spectroscopy
Calibration Period Recommendation Calibration not required - Initial validation at 6 months, then every 12 months thereafter
Time Required to Perform Validation Estimated at <15 minutes per manufacturer’s instructions
Measurement Cell Temperature Control ±0.005°C
Measurement Cell Pressure Control ±0.0002 atm
Operating Temperature 15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity <99% RH non-condensing
Accessories Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional)
Communication Interfaces RS-232, Ethernet, USB, analog 0–10 V, Modbus, 4-20mA (optional)
Sample Inlet Connection 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
Dimensions Analyzer: 17" w × 8.38" h x 24.4" d (43.2 × 21.3 × 62 cm)
Weight 73 lbs. (33.18 kg) including external pump
Power Requirements 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty 12 months
Certifications CE conformance
Country of Manufacture USA
Components/Parts Actions Frequency
Particulate filter Replace Every 6 months
Measurement Validation  Proxy validation  Every 12 months
Pump Rebuild (diaphragm) Preventive maintenance every 2 years
Fan assemblies   Replace Preventive maintenance every 2 years
External Pump  Replace Every 5 years

Take The Next Step

Learn how Picarro's real-time, high sensitivity AMC monitoring solutions enable you to minimize excursions and yield loss in your semiconductor process.

Contact our Semiconductor Team