Gas Concentration Analyzer for NH3, HCI, HF

AMC Monitoring for Inorganic Gases

The SI3401 AMC Gas Concentration Analyzer delivers real-time measurements of ammonia (NH3), hydrochloric acid (HCI), and hydrofluoric acid (HF). Designed for use in fabs, the SI3401 analyzer enables operators to quickly identify and address contamination events that can affect wafer yield.

Utilizing Picarro’s highly selective, sensitive, and accurate Cavity Ringdown Spectroscopy (CRDS), the SI3401 analyzer features:

  • Parts-per-trillion (ppt) sensitivity
  • No field calibration required, just annual verification with proxy gas mix of CH4, CO2 and O­2 
  • Fast, continuous measurements in seconds
  • Minimal maintenance with no consumables
Analyzer Product Image
Gas Detected HCl HF NH3 H2O
Precision ≤75 ppt (10 sec),
≤25 ppt (100 sec)
≤40 ppt (10 sec),
≤13 ppt (100 sec)
≤300 ppt (10 sec),
≤100 ppt (100 sec)
≤20 ppt + (8 x %H2O)(10 sec),
≤10 ppt + (4 x %H2O)(100 sec)
Lower Detectable Limit
(100s, 3σ)
75 ppt 40 ppt 300 ppt 30 ppt
Method Detection Limit
per Semi C10-1109)
250 ppt 500 ppt 500 ppt 40 ppt
Linearity ±1% ±1% ±1% ±1%
Accuracy @ span ±5% @ full scale ±5% @ full scale ±5% @ full scale ±5% @ full scale
Accuracy @ zero ±50 ppt ±25 ppt ±150 ppt ±40 ppm
Instrument-to-Instrument Consistency ±5% @ full scale
±50 ppt% @ zero
±5% @ full scale
±25 ppt% @ zero
±5% @ full scale
±150 ppt% @ zero
±5% @ full scale
±40 ppt% @ zero
Measurement Range 0-2 ppm 0-1 ppm 0-10 ppm 0-40000 ppm
Measurement Interval < 9s <5s <9s
Sample Flow Rate ~2 slpm
Combined Response Times
(T90/10 + T10/90) @ 20 ppb
<3 min <20 sec (10,000 ppm challenge)
Fall Times
(T90/10 @ 20 ppb)
<1 min <10 sec (10,000 ppm challenge)
Measurement Technique Cavity Ring-Down Spectroscopy
Operating Temperature 15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity <99% RH non-condensing
Accessories Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional)
Outputs RS-232, Ethernet, USB
Sample Inlet Connection 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
Dimensions Analyzer: 16.7" w × 8.4" h x 24.8" d (43 × 21.3 × 63 cm)
Weight 70 lbs. (31.75 kg) including pump
Power Requirements 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty 12 months
Certifications CE conformance
Country of Manufacture USA
Components/Parts Actions Frequency
Particulate filter Replace Every 6 months
Measurement Validation  Proxy validation  Every 12 months
Pump Rebuild (diaphragm) Preventive maintenance every 2 years
Fan assemblies   Replace Preventive maintenance every 2 years
External Pump  Replace Every 5 years

Take The Next Step

Learn how Picarro's real-time, high sensitivity AMC monitoring solutions enable you to minimize excursions and yield loss in your semiconductor process.

Contact our Semiconductor Team