Gas Concentration Analyzer for Sulfur Dioxide (SO2)

AMC Monitoring for Inorganic Gases

The SI5450 analyzer offers the power of highly sensitive laser spectroscopy in a robust, easy-to-use, compact design. It employs a mid-IR laser that effectively measures the concentration of SO2 gas with a high degree of accuracy and precision. It offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS), ion chromatography, mass spectroscopy, and UV fluorescence. The legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.

  • Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
  • Fast, continuous analysis in seconds
  • Virtually no downtime or consumables cost
  • Free of interference from common fab chemicals
  • Extreme accuracy for event confirmation
Analyzer Product Image
Gas Detected Sulfur Dioxide (SO2)
Precision (1σ) ≤360 ppt (10 sec),
≤120 ppt (100 sec),
≤70 ppt (300 sec)
Lower Detectable Limit (3σ) 350 ppt (100 sec),
200 ppt (300 sec),
140 ppt (600 sec)
(per IEC 61207)
Accuracy at span ±5% @ full scale
Accuracy at zero ±300 ppt
Instrument-to-Instrument Consistency ±5% @ full scale
±300 ppt @ zero
Measurement Range 0-1000 ppb
Measurement Interval* < 5 seconds
Sample Flow Rate ~0.2 slm
Combined Response Times
(T90/10 + T10/90) @ 20 ppb (Humid)
<30 seconds
Fall Times
T90/10 @ 20 ppb (Humid)
<15 seconds
Measurement Technique Cavity Ring-Down Spectroscopy
Calibration Period Recommendation Calibration not required - Initial validation at 6 months, then every 12 months thereafter
Time Required to Perform Validation Estimated at <15 minutes per manufacturer's instructions
Measurement Cell Temperature Control ±0.005°C
Measurement Cell Pressure Control ±0.0002 atm
Operating Temperature 15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity <99% RH non-condensing
Accessories Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional)
Communication Interfaces RS-232, Ethernet, USB, Modbus, 4-20mA (optional)
Sample Inlet Connection 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
Dimensions Analyzer: 16.63" w x 8.75" h x 30.25" d (42.24 x 22.22 x 76.84 cm)
Weight 75 lbs. (34 kg) including external pump
Power Requirements 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty 12 months
Certifications CE conformance
Country of Manufacture USA
Components/Parts Actions Frequency
Particulate filter Replace Every 6 months
Measurement Validation  Proxy validation  Every 12 months
Pump Rebuild (diaphragm) Preventive maintenance every 2 years
Fan assemblies   Replace Preventive maintenance every 2 years
External Pump  Replace Every 5 years

Take The Next Step

Learn how Picarro's real-time, high sensitivity AMC monitoring solutions enable you to minimize excursions and yield loss in your semiconductor process.

Contact our Semiconductor Team