Gas Concentration Analyzer for Sulfur Dioxide (SO2)
Gas Concentration Analyzer for Sulfur Dioxide (SO2)
AMC Monitoring for Inorganic Gases
AMC Monitoring for Inorganic Gases
The SI5450 analyzer offers the power of highly sensitive laser spectroscopy in a robust, easy-to-use, compact design. It employs a mid-IR laser that effectively measures the concentration of SO2 gas with a high degree of accuracy and precision. It offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS), ion chromatography, mass spectroscopy, and UV fluorescence. The legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.
- Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
- Fast, continuous analysis in seconds
- Virtually no downtime or consumables cost
- Free of interference from common fab chemicals
- Extreme accuracy for event confirmation
| Gas Detected | Sulfur Dioxide (SO2) |
|---|---|
| Precision (1σ) | ≤360 ppt (10 sec), ≤120 ppt (100 sec), ≤70 ppt (300 sec) |
| Lower Detectable Limit (3σ) | 350 ppt (100 sec), 200 ppt (300 sec), 140 ppt (600 sec) |
| Linearity (per IEC 61207) |
±1% |
| Accuracy at span | ±5% @ full scale |
| Accuracy at zero | ±300 ppt |
| Instrument-to-Instrument Consistency | ±5% @ full scale ±300 ppt @ zero |
| Measurement Range | 0-1000 ppb |
| Measurement Interval* | < 5 seconds |
| Sample Flow Rate | ~0.2 slm |
| Combined Response Times (T90/10 + T10/90) @ 20 ppb (Humid) |
<30 seconds |
| Fall Times T90/10 @ 20 ppb (Humid) |
<15 seconds |
| Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
| Calibration Period Recommendation | Calibration not required - Initial validation at 6 months, then every 12 months thereafter |
| Time Required to Perform Validation | Estimated at <15 minutes per manufacturer's instructions |
| Measurement Cell Temperature Control | ±0.005°C |
| Measurement Cell Pressure Control | ±0.0002 atm |
| Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
| Ambient Humidity | <99% RH non-condensing |
| Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional) |
| Communication Interfaces | RS-232, Ethernet, USB, Modbus, 4-20mA (optional) |
| Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
| Dimensions | Analyzer: 16.63" w x 8.75" h x 30.25" d (42.24 x 22.22 x 76.84 cm) |
| Weight | 75 lbs. (34 kg) including external pump |
| Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
| Warranty | 12 months |
| Certifications | CE conformance |
| Country of Manufacture | USA |
| Data Sheets | SI5450 Analyzer Datasheet |
|---|
| Components/Parts | Actions | Frequency |
|---|---|---|
| Particulate filter | Replace | Every 6 months |
| Measurement Validation | Proxy validation | Every 12 months |
| Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
| Fan assemblies | Replace | Preventive maintenance every 2 years |
| External Pump | Replace | Every 5 years |