SAM-C Continuous AMC Monitoring System
Integrate up to 4 Analyzers and 32 Ports
The SAM-C AMC Monitoring System integrates Picarro’s industry-leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system. Traditional sampler designs degrade individual analyzer performance through the use of a linear manifold which limits the gas flow rate to each analyzer. As a result, traditional samplersrelegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether.
The superior design of the SAM system is optimized to ensure the highest combined performance, utilizing a patent-pending non-linear multiplexing system that enables high gas flow rates, minimizes cross port contamination, and quickly reports accurate contaminant concentrations. The Picarro SAM-C system can be configured to sample multiple locations, accommodate up to four of Picarro’s SI series of analyzers to measure a variety of contaminants.
Gases Detected |
NH3, HF, HCI, SO2, H2S (depending on choice of up to 4 analyzers from table under configurations tab) |
Sampling Line |
1/2"OD x 3/8" ID UHP-PFA tubing |
Number of Ports |
24 or 32 |
Dimensions |
Keyboard Tray Closed
- 79" (H) × 34" (W) x 38" (D)
- 2012 mm (H) × 864 mm (W) × 971 mm (D)
|
Keyboard Tray Open
- 79" (H) × 34" (W) × 46" (D)
- 2012 mm (H) x 864 mm (W) × 1172 mm (D)
|
Weight (without Analyzers) |
- 24 Port: 440 lbs (200 kg)
- 32 Port: 475 Ibs (215 kg)
- Add 75 lbs (34 kg) for each analyzer
|
Power Requirements |
220-240 VAC single phase, 50/60 Hz, 20 Amp |
Communication |
Ethernet TCP/IP, RESTful API |
Warranty |
12 months |
Certifications |
CE, SEMI S2 |
Country of Manufacture |
USA |
Part Numbers (Other Combinations Available) |
SAM-C-24-A000 |
24 port stationary AMC system for NH3, HF, HCl |
SAM-C-32-A000 |
32 port stationary AMC system for NH3, HF, HCl |
SAM-C-32-ABG0 |
32 port system for NH3, HF, HCl, H2S, SO2 |
Components/Parts |
Actions |
Frequency |
Particulate filter |
Replace |
Every 6 months |
Pump |
Replace |
Every 2 years |
Fan assemblies |
Replace |
Every 2 years |
Take The Next Step
Learn how Picarro's real-time, high sensitivity AMC monitoring solutions enable you to minimize excursions and yield loss in your semiconductor process.
Contact our Semiconductor Team