SI Gas Concentration Analyzers

Sensitive, Precise Chemical Contaminant Monitoring

The Picarro SI Series of analyzers can be integrated with the SLiM 100 and SAM systems to address specific monitoring needs. They combine the power of extreme sensitivity and accuracy for a range of organic contaminants and VOCs with a highly reliable, simple and compact design. They are compliant with SEMI standards, easy to install, and inexpensive to maintain.

Analyzers Gases Measured
SI3401 NH3, HF, HCl
SI2205 HF
SI2108 HCl
SI2104 H2S
SI2306 HF, NH3
SI2103 NH3
SI5450 SO2
Picarro Analyzers Product Images

Take The Next Step

Learn how Picarro's real-time, high sensitivity AMC monitoring solutions enable you to minimize excursions and yield loss in your semiconductor process.

Contact our Semiconductor Team