Application Note: Airborne Molecular Contamination (AMC) Control in Wafer Fabrication

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SAM-C Continuous AMC Monitoring System

SAM-S Continuous AMC Monitoring System

Gas Concentration Analyzer for Ammonia (NH₃₎

Gas Concentration Analyzer for Hydrogen Chloride (HCl)

Gas Concentration Analyzer for Hydrogen Fluoride (HF)

Gas Concentration Analyzer for Hydrogen Fluroide (HF) and Ammonia (NH₃)

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